Main Features
Fine pore ceramic chuck table has the following features:
1. Dressing easily
2. Good permeability
3. Uniform adsorption affinity
4. High flatness and parallelism
5. Compact and uniform ...
Main Features
Porous ceramic vacuum chuck table for wafer processing has the following features:
1. Dressing easily
2. Good permeability
3. Uniform adsorption affinity
4. High flatness and parallelism
...
Product Features
1. High flatness and parallelism;
2. Compact and uniform microstructure with high strength;
3. Good permeability and uniform adsorption affinity;
4. Dressing easily.
Processin...